PK66X-HT
Product Description
PK66X-HT Pressure Sensor is a high-performance tool designed for measuring pressure in high-temperature (up to 250°C) and ultra-high purity gas environments. It is mainly used in semiconductor and solar cell manufacturing to ensure safe, leak-free, and ultra-clean gas delivery.
Product Description
Technical Specifications
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ApplicationGauge, Absolute, and Negative Pressure Measurement
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Measuring Range-14.7...0.....6000psi
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Maximum Measurement Error (@25°C)±0.5% FS (<160 psi: ±0.75% FS)
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Overpressure3 × rated pressure
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Medium Temperature-40 ... 150 / 200 / 250°C
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Ambient Temperature-20 ... 85°C (transmitter section)
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Temperature Coefficient (compensated range)<0.01% FS/°C
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Supply Voltage24 VDC (10 ... 30 VDC)
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Output SignalAnalog, analog + switching outputs
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Process Connection9/16-18UNF (1/4 in. VCR)
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Connection MaterialSUS316L
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Diaphragm Material316L VIM/VAR / nickel-based alloy / Hastelloy
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Long-Term StabilityTypical: 0.25% FS/year
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Repeatability≤0.1%
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Zero Adjustment-10% ... +10% of span
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Internal Surface RoughnessRa <0.15 μm
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Leak Rate≤1 × 10⁻ ¹⁰ Pa·m³/s
Configuration
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