PK66X
PK66X
PK66X
PK66X
PK66X
Ultra-high Purity Pressure Sensor
Product Description
The PK66X ultra-high-purity pressure sensor uses a flow-through design with C/W-Seal connections for continuous gas flow in high-purity lines. Class 100 cleanroom manufacturing, double vacuum packaging, and 100% helium leak testing keep the wetted path ultra-clean and leak-free, delivering stable, reliable pressure measurement for semiconductor and specialty gas applications.
Product Description
  • Sealing
    Sealing
    9/16-18UNF C/W-Seal Flow-through
  • Testing
    Testing
    100% HeliumLeak Testing
  • Packaging
    Packaging
    Vacuum Packaging in Class 100Cleanroom
  • Treatment
    Treatment
    Process connection EP level:Ra ≤ 0.15 µm
Technical Specifications
Application
Gauge, Absolute, and Negative Pressure Measurement
Measuring Range
-14.7...0.....6000psi
Accuracy (@25°C)
±0.25%FS(<160psi; ±0.5%FS)
Overload Pressure
3 × Rated Pressure
Medium Temperature
-40.....125°C
Ambient Temperature
-20....85°C
Temperature Coefficient (-20~85°C)
Zero <0.1%FS/10K; Span <0.1%FS/10K
Supply Voltage
DC24V(12...32V DC)
Output Signal
4...20mA、0...5V、0...10V
Process Connection
9/16-18UNF(1/4''VCR)
Connection Material
SUS 316L VIM/VAR
Diaphragm Material
316L VIM/VAR / Nickel-Based Alloy / Hastelloy
Long-Term Stability
Typical 0.25%FS/Year
Repeatability
≤0.1%
Zero Adjustment
-10%...+10% of Full Scale
Internal Surface Roughness:
Ra:<0.15um
Leakage Rate
≤1X10-10Pa.m³/s
Packaging
Double Vacuum Packaging, Compliant with SEMI E49.6
Document
PK66X
Product Catalog
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