PK86X-DD
PK86X-DD
PK86X-DD
Bottom-Output High-Purity Switch-Type Pressure Transmitter
Product Description
The PK86X-DD high-purity switch-type transmitter pairs 3-in-1 measurement, switching, and display functions with a bottom-exit design for flexible system integration. Its semi-grade W-Seal connection, 100% helium leak testing, and Class 100 cleanroom cleaning and vacuum packaging keep the wetted path leak-free and ultra-clean for semiconductor process gas applications.
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Product Description
  • Sealing
    Sealing
    Semi-grade W-seal
  • Testing
    Testing
    100% HeliumLeak Testing
  • Packaging
    Packaging
    Vacuum Packaging in Class 100Cleanroom
  • Treatment
    Treatment
    Process connection EP level:Ra ≤ 0.15 µm
Technical Specifications
Application
For Semiconductor Process Gases
Measurement Range
0.....100psiA
Maximum Measurement Deviation
+0.5%FS +1digit
Overload Pressure
The Rated Pressure × 3
Medium Temperature
-40....125°C
Ambient Temperature
-20....85°C
Temperature Coefficient
<0.025%FS/℃ +1digit
Supply Voltage
DC24V(12...32V DC)
Output Signal
0...5V
Switch Points
2 × NPN
Display
LED Display, Dial Rotatable by 270°
Electrical Connection
Side Cable Outlet, D-SUB 15PIN (Male)
Connection Material
316L VIM/VAR
Diaphragm Material
Hastelloy C-22
Long-Term Stability
Typical 0.25%FS/Year
Leakage Rate
≤1X10-10Pa.m³/s
Packaging
Double Vacuum Packaging, Compliant with SEMI E49.6
Document
PK86X-DD
Operation Manual
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