PG800-28
28mm High-Purity Pressure Gauge
Product Description
The PG800-28 is a compact high-purity pressure gauge with a diaphragm design, ensuring minimal contamination and easy cleaning. Ideal for semiconductor, photovoltaic, and specialty gas applications. It features 9/16-18UNF, C-Seal, and W-Seal, and is manufactured in Class 100 cleanrooms, vacuum-packed, and 100% cleaned to SEMI standards.
Product Description
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Testing100% HeliumLeak Testing
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PackagingVacuum Packaging in class 100Cleanroom
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TreatmentProcess connection Ep level:Ra ≤ 0.25 µm
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CleanlinessOil sludge residuebelow 150mg/㎡ EP grade below 50mg/㎡
Technical Specifications
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Dial Diameter1.125"(28mm)
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Measuring Range"-30inHg~30psi,-30inHg~60psi, -30inHg~0~100psi,-30inHg~0~160psi"
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Accuracy ClassNS 1.125" C Grade, Compliant with ASME B40.1
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Temperature PerformanceReference temperature +20°C; performance based on variation within measurement system
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Sensing Element"Measuring Element: Nickel-Based Alloy Tightness: Leakage Rate ≤1×10⁻¹⁰ Pa·m³/s Test Method: Helium Mass Spectrometry"
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Process Connection"Material: SUS316L VIM/VAR, Axial Type (CBM) With External Nut or 9/16-18UNF Male Thread C-Seal / W-Seal"
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Protection GradeIP54 per EN 60529 /IEC 529
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CaseSUS304,Electrolytic Polished
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DialSingle Scale, Pointer Stop Pin Oil-Free Marking, For Oxygen Service
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Cleanliness ClassAccording to SEMI Standard (Special Conditions)
Configuration
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