PK86X
PK86X
PK86X
PK86X
PK86X
High-Purity Switch-Type Pressure Transmitter
Product Description
The PK86X Series 3-in-1 High-Purity Pressure Transmitter is designed for semiconductor, LCD, LED, and other high-purity or specialty gas applications. It covers a wide pressure range from -14.7 to 5000 psi with customizable spans. Each unit undergoes 100% leak testing to prevent flammable, corrosive, or toxic gas leakage, and is fully cleaned, vacuum-packed, and manufactured in Class 100 cleanrooms to meet SEMI standards.
Product Description
  • Sealing
    Sealing
    Semi-gradeC-Seal, W-seal.and through-typeseals
  • Testing
    Testing
    100% HeliumLeak Testing
  • Packaging
    Packaging
    Vacuum Packaging in Class 100Cleanroom
  • Treatment
    Treatment
    Process connection EP level:Ra ≤ 0.15 µm
Technical Specifications
Application
Gauge Pressure, Absolute Pressure, and Negative Pressure Measurement
Measurement Range
-14.7....0....6000psi
Maximum Measurement Deviation
+0.5%FS(<160psi:±0.75%FS)
Overload Pressure
Overload Pressure x3 Rated Pressure
Medium Temperature
-40....125°C
Ambient Temperature
-20....85°C
Average Temperature Coefficient(-20~85℃)
Temperature Coefficient:<0.1%FS/10K; Span:<0.1%FS/10K
Supply Voltage
DC24V(12...32V DC)
Output Signal
4...20mA、0...5V、0..10V、1...5V
Process Connection
9/16-18UNF（1/4"VCR）/W-seal/C-seal
Connection Material
SUS316L VIM/VAR
Diaphragm Material
316L VIM/VAR/Nickel-based Alloy / Hastelloy
Stability
Typical: 0.25%FS/Year
Repeatability
≤ 0.1%
Zero Point Adjustment
Zero Point Adjustment: -10...+10%
Internal Surface Roughness
Ra:<0.15µm
Leakage Rate
≤1X10-10Pa.m³/s
Packaging
Packaging: Double Vacuum Packaging, Compliant with SEMI E49.6
Configuration
Configure the Product