PG800
PG800
PG800
PG800 high-purity pressure gauge designed for semiconductor
Product Description
The PG800 is a high-purity pressure gauge designed for semiconductor, photovoltaic, and specialty gas applications. Featuring a full 316L welded metal construction, it offers accuracy up to 1.0 class and pressure range up to 40 MPa (6000 psi). Manufactured in Class 100 cleanrooms, vacuum-packed, and 100% cleaned to meet SEMI standards. Optional switch signals with single or double electrical contacts are available.
Product Description
  • Testing
    Testing
    100% HeliumLeak Testing
  • Packaging
    Packaging
    Vacuum Packaging in Class 100Cleanroom
  • Treatment
    Treatment
    Process connection Ra ≤ 0.4um. EP level:Ra ≤ 0.25µm
  • Cleanliness
    Cleanliness
    Oil sludge residuebelow 150mg/㎡ EP grade below 50mg/㎡
Technical Specifications
Dial Diameter
1½"(40mm)、2"(50mm)、63mm
Measuring Range
'-0.1~0 to -0.1~0.9 MPa / 0~0.1 to 0~40 MPa (0~15 to 0~6000 psi)
Accuracy Class
"NS 1½"": Class B, per ASME B40.1 NS 2"": Class A, per ASME B40.1"
Temperature Performance
Based on reference temperature +20°C; maximum indication error ±0.4% of full scale per 10K variation
Sensing Element
"Stainless Steel 316L <10MPa: C-Type; >10MPa: Spiral Type Tightness: Leakage Rate ≤1×10⁻¹⁰ Pa·m³/s Test Method: Helium Mass Spectrometry"
Process Connection
"Material: Stainless Steel 316L Bottom (Radial, LM) or Back (Axial, CBM) Mounting Compression seal fitting, with nut (female thread), with external nut or 9/16-18UNF male thread, 1/4 NPT female thread"
Protection Grade
IP54 per EN 60529 /IEC 529
Instrument Movement
Stainless Steel
Pointer
Black Aluminum
Dial
Two-color or three-color, dual or triple scale, pointer stop pin Oil-free marking, for oxygen service
Case
Stainless Steel 304 / 316, Electrolytic Polished
Cleanliness Class
According to SEMI Standard (Special Conditions)
Instrument Glass
Safety Glass; NS 1½":Snap-in;NS 2":Screw on( twist-lock)
Special Design
Optional electric contact switch; alternative process connections available; surface roughness of pressure fitting Ra ≤ 0.25 μm; pressure ranges up to 40 MPa with 1/4 NPT connection.
Configuration
Configure the Product